GS-Single crystal silicon Czochralski Crystal Growth System

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This Czochralski Crystal Growth System is a CZ crystal growth system up to 2100°C and 2″ crystals. The high-precision upper weighing device facilitates better control of crystal growth process including seed dipping, shoulder expansion, and steady growth.  The upper pulling mechanism ensures a minimum pulling speed of 0.03mm/h and a rotation speed of 1 rpm. The stainless steel water-cooled chamber, paired with a vacuum pump, can achieve a maximum vacuum of 3.75e-5 torr. It is designed to grow various oxides, metals, and other materials, such as sapphire, GGG, YAG, LaAlO3, Si, Ge, Cu, and more. Customization for special technical requirements is available.

Product Description

This Czochralski Crystal Growth System is a CZ crystal growth system up to 2100°C and 2″ crystals. The high-precision upper weighing device facilitates better control of crystal growth process including seed dipping, shoulder expansion, and steady growth.  The upper pulling mechanism ensures a minimum pulling speed of 0.03mm/h and a rotation speed of 1 rpm. The stainless steel water-cooled chamber, paired with a vacuum pump, can achieve a maximum vacuum of 3.75e-5 torr. It is designed to grow various oxides, metals, and other materials, such as sapphire, GGG, YAG, LaAlO3, Si, Ge, Cu, and more. Customization for special technical requirements is available.

Features

1.Precise Temperature Control:

Equipped with advanced temperature control systems, the apparatus ensures uniform and stable temperatures throughout the growth process, promoting high-quality crystal formation.

2.Robust Design:

Constructed with durable materials and a sturdy build, the system is built to withstand the rigors of high-temperature operations and continuous use, ensuring longevity and reliability.

3.Advanced Thermal Management:

Incorporates sophisticated thermal management features that maintain optimal temperature gradients, which are essential for the controlled growth of crystals and the prevention of defects.

4.Automated Operation:

Features automated control systems that allow for precise and repeatable crystal growth processes, reducing operator error and increasing productivity.

5.Customizable Options:

Offers customizable settings and configurations to tailor the system to specific material growth requirements, enhancing versatility and adaptability.

6.Safety Features:

Includes safety mechanisms such as over-temperature protection and emergency shutdown functions to protect operators and equipment during operation.

SPECIFICATIONS:

Feature Induction heating up to 2100°C

Upper weighing system for better growth control Water-cooled stainless steel vacuum chamber Pyrometer temperature measurements

Power 480 (or 400) VAC, 3 phase, 50/60 Hz, 40 kW
Induction Heating Power 35 kW

Frequency 1-20 kHz

Duty cycle 100%

Vacuum Chamber 304 SS water-cooled vacuum chamber

Chamber size Ø500×700 mm

Observation window 80×300 mm

-0.1-0.5MPa mechanical diaphragm pressure gauge

1/4″ gas inlet and outlet

Pressure relief valve, < 3 psig

Gas Management System Gas Purification: Capable of maintaining an inert atmosphere with impurity levels below 1 ppm

Gas Flow Control: Digital flow meters with automatic regulation

Gas Types: Argon, nitrogen, or custom mixtures

Pressure Control: Maintains a controlled pressure environment within the chamber

Ultimate Vacuum 3.75e-5 torr
Temperature Measurement Pyrometer for temperature measurement of the melt.

temperature controller

Pulling Mechanism Travel distance 200 mm

Pulling speed 0.03 – 30 mm/hr

Rotation speed 1 – 60 rpm

Weighing System Upper weighing system with PID control module for consistent and reproducible crystal growth Capacity 5000 g

Accuracy 0.1 g

Control System Programmable pulling / rotation speed

Pressure monitoring and alarm

Induction power control

Weighting system with PID parameters

Data logging

Crucible System (Optional) Maximum crucible size Ø100×80 mm

Maximum crystal size, Ø2″×100 mm

Cold Crucible Growth System (Optional) The system is also compatible with cold crucible crystal growth for up to 2″

Additional cold crucible sample holder

Additional high-frequency induction power supply Additional water chiller for cold crucible cooling only.

Vacuum Pump (Optional) Mechanical pump

Turbo Pump

Water Cooling (Optional) Water cooling is optional but required.

Cooling capacity 50000 Btu/hr or 14.5 kW

Water flow 100 L/min

Product Dimensions

(W×D×H, unit mm)

Crystal Grower             1250 × 1150 ×2700

ControlTower                 565 × 800 × 1740 Induction Control Box     700 × 400 × 835 Induction Power Supply  650 × 820 × 835 Weight                             1200 kg

Warranty One-year limited warranty
Compliance NRTL certification is available upon request at the extra cost